PMID- 32999826 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20240329 IS - 2198-3844 (Print) IS - 2198-3844 (Electronic) IS - 2198-3844 (Linking) VI - 7 IP - 18 DP - 2020 Sep TI - Engineered Microstructure Derived Hierarchical Deformation of Flexible Pressure Sensor Induces a Supersensitive Piezoresistive Property in Broad Pressure Range. PG - 2000154 LID - 10.1002/advs.202000154 [doi] LID - 2000154 AB - Fabricating flexible pressure sensors with high sensitivity in a broad pressure range is still a challenge. Herein, a flexible pressure sensor with engineered microstructures on polydimethylsiloxane (PDMS) film is designed. The high performance of the sensor derives from its unique pyramid-wall-grid microstructure (PWGM). A square array of dome-topped pyramids and crossed strengthening walls on the film forms a multiheight hierarchical microstructure. Two pieces of PWGM flexible PDMS film, stacked face-to-face, form a piezoresistive sensor endowed with ultrahigh sensitivity across a very broad pressure range. The sensitivity of the device is as high as 383 665.9 and 269 662.9 kPa(-1) in the pressure ranges 0-1.6 and 1.6-6 kPa, respectively. In the higher pressure range of 6.1-11 kPa, the sensitivity is 48 689.1 kPa(-1), and even in the very high pressure range of 11-56 kPa, it stays at 1266.8 kPa(-1). The pressure sensor possesses excellent bending and torsional strain detection properties, is mechanically durable, and has potential applications in wearable biosensing for healthcare. In addition, 2 x 2 and 4 x 4 sensor arrays are prepared and characterized, suggesting the possibility of manufacturing a flexible tactile sensor. CI - (c) 2020 The Authors. Published by Wiley-VCH GmbH. FAU - Li, Gang AU - Li G AD - State Key Laboratory of Biobased Materials and Green Papermaking Qilu University of Technology Shandong Academy of Science Jinan Shandong 250353 China. FAU - Chen, Duo AU - Chen D AD - Institute for Advanced Interdisciplinary Research University of Jinan (iAIR) Jinan 250022 China. FAU - Li, Chenglong AU - Li C AD - State Key Laboratory of Biobased Materials and Green Papermaking Qilu University of Technology Shandong Academy of Science Jinan Shandong 250353 China. FAU - Liu, Wenxia AU - Liu W AD - State Key Laboratory of Biobased Materials and Green Papermaking Qilu University of Technology Shandong Academy of Science Jinan Shandong 250353 China. FAU - Liu, Hong AU - Liu H AUID- ORCID: 0000-0003-1640-9620 AD - Institute for Advanced Interdisciplinary Research University of Jinan (iAIR) Jinan 250022 China. AD - State Key Laboratory of Crystal Materials Shandong University Jinan 250100 P. R. China. LA - eng PT - Journal Article DEP - 20200819 PL - Germany TA - Adv Sci (Weinh) JT - Advanced science (Weinheim, Baden-Wurttemberg, Germany) JID - 101664569 PMC - PMC7509712 OTO - NOTNLM OT - engineered microstructures OT - flexible tactile sensors OT - hierarchical deformation modes OT - highest sensitivity OT - piezoresistive pressure sensors COIS- The authors declare no conflict of interest. EDAT- 2020/10/02 06:00 MHDA- 2020/10/02 06:01 PMCR- 2020/08/19 CRDT- 2020/10/01 05:38 PHST- 2020/01/13 00:00 [received] PHST- 2020/05/31 00:00 [revised] PHST- 2020/10/01 05:38 [entrez] PHST- 2020/10/02 06:00 [pubmed] PHST- 2020/10/02 06:01 [medline] PHST- 2020/08/19 00:00 [pmc-release] AID - ADVS1929 [pii] AID - 10.1002/advs.202000154 [doi] PST - epublish SO - Adv Sci (Weinh). 2020 Aug 19;7(18):2000154. doi: 10.1002/advs.202000154. eCollection 2020 Sep.