PMID- 33227721
OWN - NLM
STAT- PubMed-not-MEDLINE
LR  - 20210526
IS  - 1361-6528 (Electronic)
IS  - 0957-4484 (Linking)
VI  - 32
IP  - 10
DP  - 2021 Mar 5
TI  - Facile and scalable fabrication of Ni cantilever nanoprobes using silicon 
      template and micro-electroforming techniques for nano-tip focused 
      electrohydrodynamic jet printing.
PG  - 105301
LID - 10.1088/1361-6528/abccec [doi]
AB  - Electrohydrodynamic jet (E-Jet) printing is a powerful technique for 
      micro/nanostructure fabrication with high resolution and efficiency. However, 
      conventional E-Jet printing are still limited in printing accuracy and ink 
      adaptability due to the nozzle clogging effect. In this paper, we develop a 
      nano-tip focused electrohydrodynamic jet (NFEJ) method to print high-resolution 
      structures. The Ni cantilever nanoprobes with nanoscale radius of curvature (ROC) 
      on their tips were manufactured by a facile and scalable method using silicon 
      template and micro-electroforming technique. Scanning electron microscope was 
      used to analyse the micromorphology of the silicon template with inverted pyramid 
      pits, which was obtained from anisotropic wet etching of silicon. Electroforming 
      mold was obtained by photolithography and plasma etching which divide the top 
      side of Ni film into isolated cantilever pits. Ni cantilever nanoprobes with an 
      average tip ROC of about 48 nm were achieved by the subsequent micro 
      electroforming process. High-resolution droplets array with an average diameter 
      of about 890 +/- 93 nm were printed by the NFEJ printing head equipped with these 
      Ni nanoprobes, which verified the practicality of the developed Ni nanoprobes for 
      NFEJ printing.
FAU - Hu, Yaming
AU  - Hu Y
AUID- ORCID: 0000-0002-6580-2130
AD  - Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian 
      University of Technology, Dalian 116023, People's Republic of China.
FAU - Su, Shijie
AU  - Su S
AD  - Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian 
      University of Technology, Dalian 116023, People's Republic of China.
FAU - Liang, Junsheng
AU  - Liang J
AD  - Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian 
      University of Technology, Dalian 116023, People's Republic of China.
FAU - Xin, Wenwen
AU  - Xin W
AD  - Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian 
      University of Technology, Dalian 116023, People's Republic of China.
FAU - Li, Xiaojian
AU  - Li X
AD  - Key Laboratory for Precision and Non-traditional Machining Technology of Ministry 
      of Education, Dalian University of Technology, Dalian 116023, People's Republic 
      of China.
FAU - Wang, Dazhi
AU  - Wang D
AUID- ORCID: 0000-0003-0038-0771
AD  - Key Laboratory for Precision and Non-traditional Machining Technology of Ministry 
      of Education, Dalian University of Technology, Dalian 116023, People's Republic 
      of China.
LA  - eng
PT  - Journal Article
PL  - England
TA  - Nanotechnology
JT  - Nanotechnology
JID - 101241272
SB  - IM
EDAT- 2020/11/24 06:00
MHDA- 2020/11/24 06:01
CRDT- 2020/11/23 20:16
PHST- 2020/11/24 06:00 [pubmed]
PHST- 2020/11/24 06:01 [medline]
PHST- 2020/11/23 20:16 [entrez]
AID - 10.1088/1361-6528/abccec [doi]
PST - ppublish
SO  - Nanotechnology. 2021 Mar 5;32(10):105301. doi: 10.1088/1361-6528/abccec.