PMID- 33237738 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20201210 IS - 1944-8252 (Electronic) IS - 1944-8244 (Linking) VI - 12 IP - 49 DP - 2020 Dec 9 TI - Control of the Mechanical Adhesion of III-V Materials Grown on Layered h-BN. PG - 55460-55466 LID - 10.1021/acsami.0c16850 [doi] AB - Hexagonal boron nitride (h-BN) can be used as a p-doped material in wide-bandgap optoelectronic heterostructures or as a release layer to allow lift-off of grown three-dimensional (3D) GaN-based devices. To date, there have been no studies of factors that lead to or prevent lift-off and/or spontaneous delamination of layers. Here, we report a unique approach of controlling the adhesion of this layered material, which can result in both desired lift-off layered h-BN and mechanically inseparable robust h-BN layers. This is accomplished by controlling the diffusion of Al atoms into h-BN from AlN buffers grown on h-BN/sapphire. We present evidence of Al diffusion into h-BN for AlN buffers grown at high temperatures compared to conventional-temperature AlN buffers. Further evidence that the Al content in BN controls lift-off is provided by comparison of two alloys, Al(0.03)B(0.97)N/sapphire and Al(0.17)B(0.83)N/sapphire. Moreover, we tested that management of Al diffusion controls the mechanical adhesion of high-electron-mobility transistor (HEMT) devices grown on AlN/h-BN/sapphire. The results extend the control of two-dimensional (2D)/3D hetero-epitaxy and bring h-BN closer to industrial application in optoelectronics. FAU - Vuong, Phuong AU - Vuong P AUID- ORCID: 0000-0003-2775-7081 AD - Georgia Tech-CNRS, UMI 2958, Georgia Tech Lorraine, 57070 Metz, France. FAU - Sundaram, Suresh AU - Sundaram S AD - Georgia Tech-CNRS, UMI 2958, Georgia Tech Lorraine, 57070 Metz, France. AD - School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States. FAU - Mballo, Adama AU - Mballo A AD - Georgia Tech-CNRS, UMI 2958, Georgia Tech Lorraine, 57070 Metz, France. FAU - Patriarche, Gilles AU - Patriarche G AD - Centre de Nanosciences et de Nanotechnologies, Universite Paris-Saclay, C2N-Site de Marcoussis, Route de Nozay, F-91460 Marcoussis, France. FAU - Leone, Stefano AU - Leone S AD - Fraunhofer IAF, Fraunhofer Institute for Applied Solid State Physics, Tullastrasse 72, 79108 Freiburg, Germany. FAU - Benkhelifa, Fouad AU - Benkhelifa F AD - Fraunhofer IAF, Fraunhofer Institute for Applied Solid State Physics, Tullastrasse 72, 79108 Freiburg, Germany. FAU - Karrakchou, Soufiane AU - Karrakchou S AD - Georgia Tech-CNRS, UMI 2958, Georgia Tech Lorraine, 57070 Metz, France. AD - School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States. FAU - Moudakir, Tarik AU - Moudakir T AD - Institut Lafayette, 2 rue Marconi, 57070 Metz, France. FAU - Gautier, Simon AU - Gautier S AD - Institut Lafayette, 2 rue Marconi, 57070 Metz, France. FAU - Voss, Paul L AU - Voss PL AD - Georgia Tech-CNRS, UMI 2958, Georgia Tech Lorraine, 57070 Metz, France. AD - School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States. FAU - Salvestrini, Jean-Paul AU - Salvestrini JP AUID- ORCID: 0000-0002-0482-1178 AD - Georgia Tech-CNRS, UMI 2958, Georgia Tech Lorraine, 57070 Metz, France. AD - School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States. FAU - Ougazzaden, Abdallah AU - Ougazzaden A AUID- ORCID: 0000-0002-9959-5280 AD - Georgia Tech-CNRS, UMI 2958, Georgia Tech Lorraine, 57070 Metz, France. AD - School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States. LA - eng PT - Journal Article DEP - 20201125 PL - United States TA - ACS Appl Mater Interfaces JT - ACS applied materials & interfaces JID - 101504991 SB - IM OTO - NOTNLM OT - 2D boron nitride OT - III-nitrides OT - flexible (opto) electronics OT - mechanical transfer OT - semiconductors OT - transferrable nanodevices EDAT- 2020/11/26 06:00 MHDA- 2020/11/26 06:01 CRDT- 2020/11/25 17:24 PHST- 2020/11/26 06:00 [pubmed] PHST- 2020/11/26 06:01 [medline] PHST- 2020/11/25 17:24 [entrez] AID - 10.1021/acsami.0c16850 [doi] PST - ppublish SO - ACS Appl Mater Interfaces. 2020 Dec 9;12(49):55460-55466. doi: 10.1021/acsami.0c16850. Epub 2020 Nov 25.