PMID- 33375079
OWN - NLM
STAT- PubMed-not-MEDLINE
LR  - 20210218
IS  - 2072-666X (Print)
IS  - 2072-666X (Electronic)
IS  - 2072-666X (Linking)
VI  - 12
IP  - 1
DP  - 2020 Dec 22
TI  - Hybrid Full-Wave Analysis of Surface Acoustic Wave Devices for Accuracy and Fast 
      Performance Prediction.
LID - 10.3390/mi12010005 [doi]
LID - 5
AB  - In this paper, a hybrid full-wave analysis of surface acoustic wave (SAW) devices 
      is proposed to achieve accurate and fast simulation. The partial differential 
      equation (PDE) models of the physical system in question and graphics processing 
      unit (GPU)-assisted hierarchical cascading technology (HCT) are used to calculate 
      acoustic-electric characteristics of a SAW filter. The practical solid model of 
      the radio frequency (RF) filter package is constructed in High Frequency 
      Structure Simulator (HFSS) software and the parasitic electromagnetics of the 
      entire package is considered in the design process. The PDE-based models of the 
      two-dimensional finite element method (2D-FEM) are derived in detail and solved 
      by the PDE module embedded in COMSOL Multiphysics. Due to the advantages of 
      PDE-based 2D-FEM, it is universal, efficient and not restricted to handling 
      arbitrary materials and crystal cuts, electrode shapes, and multi-layered 
      substrate. Combining COMSOL Multiphysics with a user-friendly interface, a 
      flexible way of modeling and mesh generation, it can greatly reduce the 
      complicated process of modeling and physical properties definition. Based on a 
      hybrid full-wave analysis, we present an example application of this approach on 
      a TC-SAW ladder filter with 5 degrees  YX-cut LiNbO(3) substrate. Numerical results and 
      measurements were calculated for comparison, and the accuracy and efficiency of 
      the proposed method were verified.
FAU - Chen, Zhenglin
AU  - Chen Z
AUID- ORCID: 0000-0003-3088-6845
AD  - School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, 
      China.
FAU - Zhang, Qiaozhen
AU  - Zhang Q
AUID- ORCID: 0000-0002-6180-6441
AD  - Mechanical and Electrical Engineering, College of Information, Shanghai Normal 
      University, Shanghai 200234, China.
FAU - Fu, Sulei
AU  - Fu S
AD  - Key Laboratory of Advanced Materials (MOE), School of Materials Science and 
      Engineering, Tsinghua University, Beijing 100084, China.
FAU - Wang, Xiaoyu
AU  - Wang X
AD  - Key Laboratory of Modern Acoustics, Ministry of Education, Department of Acoustic 
      Science and Engineering, School of Physics, Nanjing University, Nanjing 210093, 
      China.
FAU - Qiu, Xiaojun
AU  - Qiu X
AD  - School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, 
      China.
FAU - Wu, Haodong
AU  - Wu H
AD  - Key Laboratory of Modern Acoustics, Ministry of Education, Department of Acoustic 
      Science and Engineering, School of Physics, Nanjing University, Nanjing 210093, 
      China.
LA  - eng
GR  - 2016YFC0104802/National Key Research and Development Program of China/
GR  - D171100004617001/Beijing Science and Technology Project/
GR  - 2019K053/Jiangsu Planned Projects for Postdoctoral Research Funds/
GR  - 11904233/National Natural Science Youth Foundation of China/
PT  - Journal Article
DEP - 20201222
PL  - Switzerland
TA  - Micromachines (Basel)
JT  - Micromachines
JID - 101640903
PMC - PMC7838811
OTO - NOTNLM
OT  - COMSOL Multiphysics
OT  - finite element method
OT  - graphics processing unit (GPU)
OT  - hierarchical cascading technology
OT  - parasitic electromagnetics
OT  - partial di ff erential equations
OT  - perfect match layer
OT  - surface acoustic wave (SAW) devices
COIS- The authors declare no conflict of interest.
EDAT- 2020/12/31 06:00
MHDA- 2020/12/31 06:01
PMCR- 2020/12/22
CRDT- 2020/12/30 01:03
PHST- 2020/11/26 00:00 [received]
PHST- 2020/12/14 00:00 [revised]
PHST- 2020/12/19 00:00 [accepted]
PHST- 2020/12/30 01:03 [entrez]
PHST- 2020/12/31 06:00 [pubmed]
PHST- 2020/12/31 06:01 [medline]
PHST- 2020/12/22 00:00 [pmc-release]
AID - mi12010005 [pii]
AID - micromachines-12-00005 [pii]
AID - 10.3390/mi12010005 [doi]
PST - epublish
SO  - Micromachines (Basel). 2020 Dec 22;12(1):5. doi: 10.3390/mi12010005.