PMID- 33799935 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20240331 IS - 2072-666X (Print) IS - 2072-666X (Electronic) IS - 2072-666X (Linking) VI - 12 IP - 3 DP - 2021 Mar 7 TI - A Hybrid Fuzzy Decision Model for Evaluating MEMS and IC Integration Technologies. LID - 10.3390/mi12030276 [doi] LID - 276 AB - Integrated devices incorporating MEMS (microelectromechanical systems) with IC (integrated circuit) components have been becoming increasingly important in the era of IoT (Internet of Things). In this study, a hybrid fuzzy MCDM (multi-criteria decision making) model was proposed to effectively evaluate alternative technologies that incorporate MEMS with IC components. This model, composed of the fuzzy AHP (analytic hierarchy process) and fuzzy VIKOR (VIseKriterijumska Optimizacija I Kompromisno Resenje) methods, solves the decision problem of how best to rank MEMS and IC integration technologies in a fuzzy environment. The six important criteria and the major five alternative technologies associated with our research themes were explored through literature review and expert investigations. The priority weights of criteria were derived using fuzzy AHP. After that, fuzzy VIKOR was deployed to rank alternatives. The empirical results show that development schedule and manufacturing capability are the two most important criteria and 3D (three-dimensional) SiP (system-in-package) and monolithic SoC (system-on-chip) are the top two favored technologies. The proposed fuzzy decision model could serve as a reference for the future strategic evaluation and selection of MEMS and IC integration technologies. FAU - Lee, Qian-Yo AU - Lee QY AD - Department of Biomechatronic Engineering, National Chiayi University, No. 300, Syuefu Rd., Chiayi City 600355, Taiwan. FAU - Lee, Ming-Xuan AU - Lee MX AD - Graduate Institute of Electronics Engineering, National Taiwan University, No. 1, Sec. 4, Roosevelt Rd., Taipei City 10617, Taiwan. FAU - Lee, Yen-Chun AU - Lee YC AUID- ORCID: 0000-0002-2464-5802 AD - Institute of Management of Technology, National Yang Ming Chiao Tung University, No. 1001, University Rd., Hsinchu City 300, Taiwan. LA - eng PT - Journal Article DEP - 20210307 PL - Switzerland TA - Micromachines (Basel) JT - Micromachines JID - 101640903 PMC - PMC7998571 OTO - NOTNLM OT - MCDM OT - MEMS and IC integration OT - fuzzy AHP OT - fuzzy VIKOR OT - technology evaluation COIS- The authors declare no conflict of interest. EDAT- 2021/04/04 06:00 MHDA- 2021/04/04 06:01 PMCR- 2021/03/07 CRDT- 2021/04/03 01:04 PHST- 2021/02/02 00:00 [received] PHST- 2021/03/04 00:00 [revised] PHST- 2021/03/04 00:00 [accepted] PHST- 2021/04/03 01:04 [entrez] PHST- 2021/04/04 06:00 [pubmed] PHST- 2021/04/04 06:01 [medline] PHST- 2021/03/07 00:00 [pmc-release] AID - mi12030276 [pii] AID - micromachines-12-00276 [pii] AID - 10.3390/mi12030276 [doi] PST - epublish SO - Micromachines (Basel). 2021 Mar 7;12(3):276. doi: 10.3390/mi12030276.