PMID- 34203488
OWN - NLM
STAT- PubMed-not-MEDLINE
LR  - 20210727
IS  - 2072-666X (Print)
IS  - 2072-666X (Electronic)
IS  - 2072-666X (Linking)
VI  - 12
IP  - 7
DP  - 2021 Jun 28
TI  - Integration of Ultra-Low Volume Pneumatic Microfluidics with a Three-Dimensional 
      Electrode Network for On-Chip Biochemical Sensing.
LID - 10.3390/mi12070762 [doi]
LID - 762
AB  - This paper reports a novel miniaturized pseudo reference electrode (RE) design 
      for biasing Ion Sensitive Field Effect Transistors (ISFETs). It eliminates the 
      need for post-CMOS processing and can scale up in numbers with the CMOS scaling. 
      The presented design employs silane-mediated transfer of patterned gold electrode 
      lines onto PDMS microfluidics such that the gold conformally coats the inside of 
      microfluidic channel. Access to this electrode network is made possible by using 
      "through-PDMS-vias" (TPV), which consist of high metal-coated SU-8 pillars 
      manufactured by a novel process that employs a patterned positive resist layer as 
      SU-8 adhesion depressor. When integrated with pneumatic valves, TPV and pseudo-RE 
      network were able to bias 1.5 nanoliters (nL) of isolated electrolyte volumes. We 
      present a detailed characterization of our pseudo-RE design demonstrating ISFET 
      operation and its DC characterization. The stability of pseudo-RE is investigated 
      by measuring open circuit potential (OCP) against a commercial Ag/AgCl reference 
      electrode.
FAU - Tomar, Saurabh
AU  - Tomar S
AUID- ORCID: 0000-0003-2259-6186
AD  - Laboratory of Life Sciences Electronics, Ecole Polytechnique Federale de 
      Lausanne, 1015 Lausanne, Switzerland.
FAU - Lasne, Charlotte
AU  - Lasne C
AD  - Laboratory of Life Sciences Electronics, Ecole Polytechnique Federale de 
      Lausanne, 1015 Lausanne, Switzerland.
FAU - Barraud, Sylvain
AU  - Barraud S
AD  - Laboratoire d'Electronique et de Technologie de l'Information (LETI), 
      Commissariat a l'Energie Atomique et aux Energies Alternatives (CEA), CEDEX 9, 
      38054 Grenoble, France.
FAU - Ernst, Thomas
AU  - Ernst T
AD  - Laboratoire d'Electronique et de Technologie de l'Information (LETI), 
      Commissariat a l'Energie Atomique et aux Energies Alternatives (CEA), CEDEX 9, 
      38054 Grenoble, France.
FAU - Guiducci, Carlotta
AU  - Guiducci C
AUID- ORCID: 0000-0002-1745-7782
AD  - Laboratory of Life Sciences Electronics, Ecole Polytechnique Federale de 
      Lausanne, 1015 Lausanne, Switzerland.
LA  - eng
GR  - N62909-16-1-2187/Office of Naval Research Global/
PT  - Journal Article
DEP - 20210628
PL  - Switzerland
TA  - Micromachines (Basel)
JT  - Micromachines
JID - 101640903
PMC - PMC8306664
OTO - NOTNLM
OT  - ISFET
OT  - PDMS
OT  - SU-8
OT  - flexible electronics
OT  - microfluidics
OT  - packaging
OT  - pneumatic valves
OT  - post-CMOS processing
OT  - reference electrode
COIS- The authors declare no conflict of interest.
EDAT- 2021/07/03 06:00
MHDA- 2021/07/03 06:01
PMCR- 2021/06/28
CRDT- 2021/07/02 01:17
PHST- 2021/05/31 00:00 [received]
PHST- 2021/06/22 00:00 [revised]
PHST- 2021/06/25 00:00 [accepted]
PHST- 2021/07/02 01:17 [entrez]
PHST- 2021/07/03 06:00 [pubmed]
PHST- 2021/07/03 06:01 [medline]
PHST- 2021/06/28 00:00 [pmc-release]
AID - mi12070762 [pii]
AID - micromachines-12-00762 [pii]
AID - 10.3390/mi12070762 [doi]
PST - epublish
SO  - Micromachines (Basel). 2021 Jun 28;12(7):762. doi: 10.3390/mi12070762.