PMID- 34832730 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20211130 IS - 2072-666X (Print) IS - 2072-666X (Electronic) IS - 2072-666X (Linking) VI - 12 IP - 11 DP - 2021 Oct 27 TI - Study of Normally-Off AlGaN/GaN HEMT with Microfield Plate for Improvement of Breakdown Voltage. LID - 10.3390/mi12111318 [doi] LID - 1318 AB - In this paper, we introduce a new type of AlGaN/GaN high electron mobility transistor (HEMT) with microfield plate (FP). We use Silvaco-ATLAS two-dimensional numerical simulation to calculate the performance of conventional HEMT and HEMT with micro-FP and analyze its principle. By studying a new charge balance method provided by HEMTs and micro-FPs, the physical mechanism of FP adjusting the HEMT potential distribution and channel electric field distribution is analyzed. The new FP structure consists of a drain field plate (D-FP), a source field plate (S-FP) and several micro-gate field plates (G-FP) to improve the output characteristics of HEMTs. By adjusting the distribution of potential and channel electric field, a wider and more uniform channel electric field can be obtained, and the breakdown voltage can be increased to 1278 V. Although the on-resistance of the HEMT is slightly increased to 5.24 Omega mm, it is still lower than other reference values. These results may open up a new and effective method for manufacturing high-power devices for power electronics applications. FAU - Xia, Xiaoyu AU - Xia X AUID- ORCID: 0000-0001-7405-8385 AD - Institute of Semiconductors Science and Technology, South China Normal University, Guangzhou 510631, China. FAU - Guo, Zhiyou AU - Guo Z AD - Institute of Semiconductors Science and Technology, South China Normal University, Guangzhou 510631, China. FAU - Sun, Huiqing AU - Sun H AD - Institute of Semiconductors Science and Technology, South China Normal University, Guangzhou 510631, China. LA - eng GR - 2019B010128002/Key-Area Research and Development Programof Guangdong Province/ GR - 2020B010171002/Key-Area Research and Development Programof Guangdong Province/ GR - 1920001000724/Foshan Science and Technology Bureau/ GR - 2019KTSCX084/Guangdong Science and Technology Project/ GR - 201807010083/Guangzhou Science and Technology Program Key Projects/ PT - Journal Article DEP - 20211027 PL - Switzerland TA - Micromachines (Basel) JT - Micromachines JID - 101640903 PMC - PMC8623632 OTO - NOTNLM OT - GaN HEMT OT - breakdown voltage OT - field plate OT - normally-off COIS- The authors declare no conflict of interest. EDAT- 2021/11/28 06:00 MHDA- 2021/11/28 06:01 PMCR- 2021/10/27 CRDT- 2021/11/27 01:19 PHST- 2021/09/26 00:00 [received] PHST- 2021/10/18 00:00 [revised] PHST- 2021/10/25 00:00 [accepted] PHST- 2021/11/27 01:19 [entrez] PHST- 2021/11/28 06:00 [pubmed] PHST- 2021/11/28 06:01 [medline] PHST- 2021/10/27 00:00 [pmc-release] AID - mi12111318 [pii] AID - micromachines-12-01318 [pii] AID - 10.3390/mi12111318 [doi] PST - epublish SO - Micromachines (Basel). 2021 Oct 27;12(11):1318. doi: 10.3390/mi12111318.