PMID- 34852522 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20211202 IS - 1089-7623 (Electronic) IS - 0034-6748 (Linking) VI - 92 IP - 11 DP - 2021 Nov 1 TI - Extreme ultraviolet-excited time-resolved luminescence spectroscopy using an ultrafast table-top high-harmonic generation source. PG - 113004 LID - 10.1063/5.0064780 [doi] AB - We present a table-top extreme ultraviolet (XUV) beamline for measuring time- and frequency-resolved XUV-excited optical luminescence (XEOL) with additional femtosecond-resolution XUV transient absorption spectroscopy functionality. XUV pulses are generated via high-harmonic generation using a near-infrared pulse in a noble gas medium and focused to excite luminescence from a solid sample. The luminescence is collimated and guided into a streak camera where its spectral components are temporally resolved with picosecond temporal resolution. We time-resolve XUV-excited luminescence and compare the results to luminescence decays excited at longer wavelengths for three different materials: (i) sodium salicylate, an often used XUV scintillator; (ii) fluorescent labeling molecule 4-carbazole benzoic (CB) acid; and (iii) a zirconium metal oxo-cluster labeled with CB, which is a photoresist candidate for extreme-ultraviolet lithography. Our results establish time-resolved XEOL as a new technique to measure transient XUV-driven phenomena in solid-state samples and identify decay mechanisms of molecules following XUV and soft-x-ray excitation. FAU - van der Geest, M L S AU - van der Geest MLS AUID- ORCID: 0000000166471655 AD - Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands. FAU - Sadegh, N AU - Sadegh N AUID- ORCID: 0000000232834697 AD - Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands. FAU - Meerwijk, T M AU - Meerwijk TM AD - Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands. FAU - Wooning, E I AU - Wooning EI AD - Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands. FAU - Wu, L AU - Wu L AUID- ORCID: 0000000230610059 AD - Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands. FAU - Bloem, R AU - Bloem R AUID- ORCID: 0000000158546733 AD - Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands. FAU - Castellanos Ortega, S AU - Castellanos Ortega S AUID- ORCID: 0000000248801910 AD - Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands. FAU - Brouwer, A M AU - Brouwer AM AUID- ORCID: 0000000217313869 AD - Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands. FAU - Kraus, P M AU - Kraus PM AUID- ORCID: 0000000229895560 AD - Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands. LA - eng PT - Journal Article PL - United States TA - Rev Sci Instrum JT - The Review of scientific instruments JID - 0405571 SB - IM EDAT- 2021/12/03 06:00 MHDA- 2021/12/03 06:01 CRDT- 2021/12/02 05:28 PHST- 2021/12/02 05:28 [entrez] PHST- 2021/12/03 06:00 [pubmed] PHST- 2021/12/03 06:01 [medline] AID - 10.1063/5.0064780 [doi] PST - ppublish SO - Rev Sci Instrum. 2021 Nov 1;92(11):113004. doi: 10.1063/5.0064780.