PMID- 35057308
OWN - NLM
STAT- PubMed-not-MEDLINE
LR  - 20220128
IS  - 1996-1944 (Print)
IS  - 1996-1944 (Electronic)
IS  - 1996-1944 (Linking)
VI  - 15
IP  - 2
DP  - 2022 Jan 13
TI  - Utilizing a Diffractive Focus Beam Shaper to Enhance Pattern Uniformity and 
      Process Throughput during Direct Laser Interference Patterning.
LID - 10.3390/ma15020591 [doi]
LID - 591
AB  - Uniform periodic microstructure formation over large areas is generally 
      challenging in Direct Laser Interference Patterning (DLIP) due to the Gaussian 
      laser beam intensity distribution inherent to most commercial laser sources. In 
      this work, a diffractive fundamental beam-mode shaper (FBS) element is 
      implemented in a four-beam DLIP optical setup to generate a square-shaped top-hat 
      intensity distribution in the interference volume. The interference patterns 
      produced by a standard configuration and the developed setup are measured and 
      compared. In particular, the impact of both laser intensity distributions on 
      process throughput as well as fill-factor is investigated by measuring the 
      resulting microstructure height with height error over the structured surface. It 
      is demonstrated that by utilizing top-hat-shaped interference patterns, it is 
      possible to produce on average 44.8% deeper structures with up to 60% higher 
      homogeneity at the same throughput. Moreover, the presented approach allows the 
      production of microstructures with comparable height and homogeneity compared to 
      the Gaussian intensity distribution with increased throughput of 53%.
FAU - El-Khoury, Mikhael
AU  - El-Khoury M
AD  - Institute for Manufacturing Technology, Technische Universitat Dresden, 
      George-Baehr-Str. 3c, 01069 Dresden, Germany.
FAU - Voisiat, Bogdan
AU  - Voisiat B
AUID- ORCID: 0000-0003-0553-6309
AD  - Institute for Manufacturing Technology, Technische Universitat Dresden, 
      George-Baehr-Str. 3c, 01069 Dresden, Germany.
FAU - Kunze, Tim
AU  - Kunze T
AD  - Fusion Bionic GmbH, Winterbergstrasse 28, 01277 Dresden, Germany.
FAU - Lasagni, Andres Fabian
AU  - Lasagni AF
AD  - Institute for Manufacturing Technology, Technische Universitat Dresden, 
      George-Baehr-Str. 3c, 01069 Dresden, Germany.
AD  - Fraunhofer-Institut fur Werkstoff- und Strahltechnik IWS, Winterbergstr. 28, 
      01277 Dresden, Germany.
LA  - eng
GR  - LA2513 7-1/Deutsche Forschungsgemeinschaft/
GR  - 768701/European Union's Horizon 2020 Framework Program/
GR  - FKZ 03XP0198G/Federal Ministry of Education and Research/
PT  - Journal Article
DEP - 20220113
PL  - Switzerland
TA  - Materials (Basel)
JT  - Materials (Basel, Switzerland)
JID - 101555929
PMC - PMC8781107
OTO - NOTNLM
OT  - direct laser interference patterning
OT  - filling-factor
OT  - fundamental beam mode shaper
OT  - homogeneity
OT  - throughput
OT  - top-hat beam profile
COIS- The authors declare no conflict of interest. The funders had no role in the 
      design of the study, in the collection, analyses, or interpretation of data, in 
      the writing of the manuscript, or in the decision to publish the results.
EDAT- 2022/01/22 06:00
MHDA- 2022/01/22 06:01
PMCR- 2022/01/13
CRDT- 2022/01/21 01:16
PHST- 2021/11/16 00:00 [received]
PHST- 2021/12/23 00:00 [revised]
PHST- 2021/12/23 00:00 [accepted]
PHST- 2022/01/21 01:16 [entrez]
PHST- 2022/01/22 06:00 [pubmed]
PHST- 2022/01/22 06:01 [medline]
PHST- 2022/01/13 00:00 [pmc-release]
AID - ma15020591 [pii]
AID - materials-15-00591 [pii]
AID - 10.3390/ma15020591 [doi]
PST - epublish
SO  - Materials (Basel). 2022 Jan 13;15(2):591. doi: 10.3390/ma15020591.