PMID- 35073054 OWN - NLM STAT- MEDLINE DCOM- 20220314 LR - 20220314 IS - 1520-6882 (Electronic) IS - 0003-2700 (Linking) VI - 94 IP - 5 DP - 2022 Feb 8 TI - Development of Machine-Learning Techniques for Time-of-Flight Secondary Ion Mass Spectrometry Spectral Analysis: Application for the Identification of Silane Coupling Agents in Multicomponent Films. PG - 2546-2553 LID - 10.1021/acs.analchem.1c04436 [doi] AB - Time-of-flight secondary ion mass spectrometry (ToF-SIMS) is an important analysis technique that can gather vast amounts of information from surfaces. Recently, machine learning was combined with ToF-SIMS to successfully extract useful information from mass spectra. However, the descriptor generation required for ToF-SIMS analysis using machine learning remains challenging because it requires a lot of effort, is time-consuming, and significantly limits the versatility and practicality of the machine learning approach for ToF-SIMS analysis. Herein, we proposed a new approach to avoid the descriptor generation: to regard ToF-SIMS spectra as images and apply the convolutional neural network (CNN) to analyze these spectral images. We applied and assessed this approach for the identification of silane coupling agents in multicomponent films. Furthermore, the CNN showed higher accuracy than descriptor-based approaches, suggesting its usefulness in achieving the automation and standardization of the ToF-SIMS analysis. FAU - Lang, Yusheng AU - Lang Y AD - Innovative Technology Laboratories, AGC Incorporated, Yokohama 230-0045, Japan. FAU - Zhou, Lilin AU - Zhou L AUID- ORCID: 0000-0003-0019-0310 AD - Innovative Technology Laboratories, AGC Incorporated, Yokohama 230-0045, Japan. FAU - Imamura, Yutaka AU - Imamura Y AD - Innovative Technology Laboratories, AGC Incorporated, Yokohama 230-0045, Japan. LA - eng PT - Journal Article DEP - 20220124 PL - United States TA - Anal Chem JT - Analytical chemistry JID - 0370536 RN - 0 (Silanes) SB - IM MH - Automation MH - Machine Learning MH - *Silanes MH - *Spectrometry, Mass, Secondary Ion/methods MH - Spectrum Analysis EDAT- 2022/01/25 06:00 MHDA- 2022/03/15 06:00 CRDT- 2022/01/24 17:13 PHST- 2022/01/25 06:00 [pubmed] PHST- 2022/03/15 06:00 [medline] PHST- 2022/01/24 17:13 [entrez] AID - 10.1021/acs.analchem.1c04436 [doi] PST - ppublish SO - Anal Chem. 2022 Feb 8;94(5):2546-2553. doi: 10.1021/acs.analchem.1c04436. Epub 2022 Jan 24.