PMID- 35442622 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20220505 IS - 1944-8252 (Electronic) IS - 1944-8244 (Linking) VI - 14 IP - 17 DP - 2022 May 4 TI - Performance Enhancement of SnS/h-BN Heterostructure p-Type FET via the Thermodynamically Predicted Surface Oxide Conversion Method. PG - 19928-19937 LID - 10.1021/acsami.2c05534 [doi] AB - Searching for the counterpart of well-developed two-dimensional (2D) n-type field effect transistors (FETs) is indispensable for complementary logic circuit applications for 2D devices. Although SnS is regarded as a potential candidate for high-performance p-type FETs, recent experiments only show poor results deviating from the theoretically predicted high mobility. In this research, the serious performance degradation due to the surface oxidation of SnS, which commonly occurs in most 2D materials, is addressed through surface oxide conversion using highly reactive Ti. In this conversion process, which is confirmed by systematic characterization, the reduction of SnS surface oxide is accompanied by the formation of functional titanium oxide, which works as both a conductive intermediate layer to improve the contact property and a buffer layer of the high-k top gate insulator at the channel region. Consequently, a record-high field effect mobility of 87.4 cm(2) V(-1) s(-1) in SnS p-type FETs is achieved. The surface oxide conversion method applied here is consistent with our previous thermodynamic prediction, and this novel technique can be widely introduced to all 2D materials that are vulnerable to oxidation and facilitate the future development of 2D devices. FAU - Chang, Yih-Ren AU - Chang YR AD - Department of Materials Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan. FAU - Nishimura, Tomonori AU - Nishimura T AD - Department of Materials Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan. FAU - Taniguchi, Takashi AU - Taniguchi T AUID- ORCID: 0000-0002-1467-3105 AD - International Center for Materials Nanoarchitectonics, National Institute of Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan. FAU - Watanabe, Kenji AU - Watanabe K AUID- ORCID: 0000-0003-3701-8119 AD - Research Center for Functional Materials, National Institute of Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan. FAU - Nagashio, Kosuke AU - Nagashio K AUID- ORCID: 0000-0003-1181-8644 AD - Department of Materials Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan. LA - eng PT - Journal Article DEP - 20220420 PL - United States TA - ACS Appl Mater Interfaces JT - ACS applied materials & interfaces JID - 101504991 SB - IM OTO - NOTNLM OT - 2D materials OT - SnS OT - h-BN OT - oxide reduction OT - p-FET EDAT- 2022/04/21 06:00 MHDA- 2022/04/21 06:01 CRDT- 2022/04/20 17:11 PHST- 2022/04/21 06:00 [pubmed] PHST- 2022/04/21 06:01 [medline] PHST- 2022/04/20 17:11 [entrez] AID - 10.1021/acsami.2c05534 [doi] PST - ppublish SO - ACS Appl Mater Interfaces. 2022 May 4;14(17):19928-19937. doi: 10.1021/acsami.2c05534. Epub 2022 Apr 20.