PMID- 35744445 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20220716 IS - 2072-666X (Print) IS - 2072-666X (Electronic) IS - 2072-666X (Linking) VI - 13 IP - 6 DP - 2022 May 26 TI - Reduction in RF Loss Based on AlGaN Back-Barrier Structure Changes. LID - 10.3390/mi13060830 [doi] LID - 830 AB - We designed a high electron mobility transistor (HEMT) epitaxial structure based on an AlGaN/GaN heterojunction, utilizing Silvaco TCAD, and selected AlGaN with an aluminum composition of 0.1 as the back-barrier of the AlGaN/GaN heterojunction. We enhanced the confinement of the two-dimensional electron gas (2DEG) by optimizing the structural parameters of the back barrier, so that the leakage current of the buffer layer is reduced. Through these optimization methods, a lower drain leakage current and a good radio frequency performance were obtained. The device has a cut-off frequency of 48.9 GHz, a maximum oscillation frequency of 73.20 GHz, and a radio frequency loss of 0.239 dB/mm (at 6 GHz). This work provides a basis for the preparation of radio frequency devices with excellent frequency characteristics and low RF loss. FAU - Fang, Yi AU - Fang Y AD - The Engineering Research Center for Optoelectronics of Guangdong Province, School of Physics and Optoelectronics, South China University of Technology, Guangzhou 510640, China. FAU - Chen, Ling AU - Chen L AD - The Engineering Research Center for Optoelectronics of Guangdong Province, School of Physics and Optoelectronics, South China University of Technology, Guangzhou 510640, China. FAU - Liu, Yuqi AU - Liu Y AD - The Engineering Research Center for Optoelectronics of Guangdong Province, School of Physics and Optoelectronics, South China University of Technology, Guangzhou 510640, China. FAU - Wang, Hong AU - Wang H AUID- ORCID: 0000-0002-8875-0521 AD - The Engineering Research Center for Optoelectronics of Guangdong Province, School of Physics and Optoelectronics, South China University of Technology, Guangzhou 510640, China. AD - The Guangdong Provincial Engineering Laboratory for Wide Bandgap Semiconductor Materials and Devices, School of Electronics and Information Engineering, South China University of Technology, Guangzhou 510640, China. AD - Zhongshan Institute of Modern Industrial Technology, South China University of Technology, Zhongshan 528437, China. LA - eng GR - No. 2020B010171001/Science and Technologies Plan Projects of Guangdong Province/ GR - No. 2017B010112003/Science and Technologies Plan Projects of Guangdong Province/ GR - No. 201905010001/Guangzhou Municipal Science and Technologies Plan Projects/ GR - No. 201604046021/Guangzhou Municipal Science and Technologies Plan Projects/ GR - No. 2019AG014/Science and Technology Development Special Fund Projects of Zhongshan City/ GR - No. 2019AG042/Science and Technology Development Special Fund Projects of Zhongshan City/ GR - No. 2020AG023/Science and Technology Development Special Fund Projects of Zhongshan City/ PT - Journal Article DEP - 20220526 PL - Switzerland TA - Micromachines (Basel) JT - Micromachines JID - 101640903 PMC - PMC9227317 OTO - NOTNLM OT - AlGaN OT - HEMT OT - RF loss OT - back-barrier COIS- The authors declare no conflict of interest. EDAT- 2022/06/25 06:00 MHDA- 2022/06/25 06:01 PMCR- 2022/05/26 CRDT- 2022/06/24 01:30 PHST- 2022/05/02 00:00 [received] PHST- 2022/05/22 00:00 [revised] PHST- 2022/05/24 00:00 [accepted] PHST- 2022/06/24 01:30 [entrez] PHST- 2022/06/25 06:00 [pubmed] PHST- 2022/06/25 06:01 [medline] PHST- 2022/05/26 00:00 [pmc-release] AID - mi13060830 [pii] AID - micromachines-13-00830 [pii] AID - 10.3390/mi13060830 [doi] PST - epublish SO - Micromachines (Basel). 2022 May 26;13(6):830. doi: 10.3390/mi13060830.