PMID- 35914677 OWN - NLM STAT- PubMed-not-MEDLINE DCOM- 20221007 LR - 20230705 IS - 1476-4687 (Electronic) IS - 0028-0836 (Linking) VI - 610 IP - 7930 DP - 2022 Oct TI - P-type electrical contacts for 2D transition-metal dichalcogenides. PG - 61-66 LID - 10.1038/s41586-022-05134-w [doi] AB - Digital logic circuits are based on complementary pairs of n- and p-type field effect transistors (FETs) via complementary metal oxide semiconductor technology. In three-dimensional (3D) or bulk semiconductors, substitutional doping of acceptor or donor impurities is used to achieve p- and n-type FETs. However, the controllable p-type doping of low-dimensional semiconductors such as two-dimensional (2D) transition-metal dichalcogenides (TMDs) has proved to be challenging. Although it is possible to achieve high-quality, low-resistance n-type van der Waals (vdW) contacts on 2D TMDs(1-5), obtaining p-type devices by evaporating high-work-function metals onto 2D TMDs has not been realized so far. Here we report high-performance p-type devices on single- and few-layered molybdenum disulfide and tungsten diselenide based on industry-compatible electron beam evaporation of high-work-function metals such as palladium and platinum. Using atomic resolution imaging and spectroscopy, we demonstrate near-ideal vdW interfaces without chemical interactions between the 2D TMDs and 3D metals. Electronic transport measurements reveal that the Fermi level is unpinned and p-type FETs based on vdW contacts exhibit low contact resistance of 3.3 kOmega microm, high mobility values of approximately 190 cm(2 )V(-1 )s(-1) at room temperature, saturation currents in excess of 10(-5) A mum(-)(1) and an on/off ratio of 10(7). We also demonstrate an ultra-thin photovoltaic cell based on n- and p-type vdW contacts with an open circuit voltage of 0.6 V and a power conversion efficiency of 0.82%. CI - (c) 2022. The Author(s), under exclusive licence to Springer Nature Limited. FAU - Wang, Yan AU - Wang Y AUID- ORCID: 0000-0001-9241-3512 AD - Department of Materials Science and Metallurgy, University of Cambridge, Cambridge, UK. FAU - Kim, Jong Chan AU - Kim JC AUID- ORCID: 0000-0003-4101-0590 AD - Department of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan, Republic of Korea. FAU - Li, Yang AU - Li Y AUID- ORCID: 0000-0003-2005-7381 AD - Department of Materials Science and Metallurgy, University of Cambridge, Cambridge, UK. FAU - Ma, Kyung Yeol AU - Ma KY AD - Department of Chemistry & Low-Dimensional Carbon Materials Center, Ulsan National Institute of Science and Technology (UNIST), Ulsan, Republic of Korea. FAU - Hong, Seokmo AU - Hong S AD - Department of Chemistry & Low-Dimensional Carbon Materials Center, Ulsan National Institute of Science and Technology (UNIST), Ulsan, Republic of Korea. FAU - Kim, Minsu AU - Kim M AD - Department of Chemistry & Low-Dimensional Carbon Materials Center, Ulsan National Institute of Science and Technology (UNIST), Ulsan, Republic of Korea. FAU - Shin, Hyeon Suk AU - Shin HS AUID- ORCID: 0000-0003-0495-7443 AD - Department of Chemistry & Low-Dimensional Carbon Materials Center, Ulsan National Institute of Science and Technology (UNIST), Ulsan, Republic of Korea. FAU - Jeong, Hu Young AU - Jeong HY AUID- ORCID: 0000-0002-5550-5298 AD - Graduate School of Semiconductor Materials and Devices Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan, Republic of Korea. FAU - Chhowalla, Manish AU - Chhowalla M AUID- ORCID: 0000-0002-8183-4044 AD - Department of Materials Science and Metallurgy, University of Cambridge, Cambridge, UK. mc209@cam.ac.uk. LA - eng PT - Journal Article PT - Research Support, Non-U.S. Gov't DEP - 20220801 PL - England TA - Nature JT - Nature JID - 0410462 SB - IM EDAT- 2022/08/02 06:00 MHDA- 2022/10/12 06:00 CRDT- 2022/08/01 19:15 PHST- 2021/02/26 00:00 [received] PHST- 2022/07/21 00:00 [accepted] PHST- 2022/08/02 06:00 [pubmed] PHST- 2022/10/12 06:00 [medline] PHST- 2022/08/01 19:15 [entrez] AID - 10.1038/s41586-022-05134-w [pii] AID - 10.1038/s41586-022-05134-w [doi] PST - ppublish SO - Nature. 2022 Oct;610(7930):61-66. doi: 10.1038/s41586-022-05134-w. Epub 2022 Aug 1.