PMID- 36113208
OWN - NLM
STAT- MEDLINE
DCOM- 20220928
LR  - 20220928
IS  - 1873-2828 (Electronic)
IS  - 1350-4177 (Print)
IS  - 1350-4177 (Linking)
VI  - 89
DP  - 2022 Sep
TI  - Theoretical and experimental investigations on rotary ultrasonic surface 
      micro-machining of brittle materials.
PG  - 106162
LID - S1350-4177(22)00258-9 [pii]
LID - 10.1016/j.ultsonch.2022.106162 [doi]
LID - 106162
AB  - Many brittle materials, such as single-crystal materials, amorphous materials, 
      and ceramics, are widely used in many industries such as the energy industry, 
      aerospace industry, and biomedical industry. In recent years, there is an 
      increasing demand for high-precision micro-machining of these brittle materials 
      to produce precision functional parts. Traditional ultra-precision 
      micro-machining can lead to workpiece cracking, low machined surface quality, and 
      reduced tool life. To reduce and further solve these problems, a new 
      micro-machining process is needed. As one of the nontraditional machining 
      processes, rotary ultrasonic machining is an effective method to reduce the 
      issues generated by traditional machining processes of brittle materials. 
      Therefore, rotary ultrasonic micro-machining (RUmuM) is investigated to conduct 
      the surface micro-machining of brittle materials. Due to the small diameter 
      cutting tool (<500 mum) and high accuracy requirements, the impact of input 
      parameters in the rotary ultrasonic surface micro-machining (RUSmuM) process on 
      tool deformation and cutting quality is extremely different from that in rotary 
      ultrasonic surface machining (RUSM) with relatively large diameter cutting tool 
      ( approximately 10 mm). Up till now, there is still no investigation on the effects of 
      ultrasonic vibration (UV) and input variables (such as tool rotation speed and 
      depth of cut) on cutting force and machined surface quality in RUSmuM of brittle 
      materials. To fill this knowledge gap, rotary ultrasonic surface micro-machining 
      of the silicon wafer (one of the most versatile brittle materials) was conducted 
      in this study. The effects of ultrasonic vibration, tool rotation speed, and 
      depth of cut on tool trajectory, material removal rate (MRR), cutting force, 
      cutting surface quality, and residual stress were investigated. Results show that 
      the ultrasonic vibration could reduce the cutting force, improve the cutting 
      surface quality, and suppress the residual compressive stress, especially under 
      conditions with high tool rotation speed.
CI  - Copyright (c) 2022 The Authors. Published by Elsevier B.V. All rights reserved.
FAU - Li, Yunze
AU  - Li Y
AD  - Department of Industrial, Manufacturing, and Systems Engineering, Texas Tech 
      University, Lubbock, TX 79409, USA.
FAU - Zhang, Dongzhe
AU  - Zhang D
AD  - Department of Industrial, Manufacturing, and Systems Engineering, Texas Tech 
      University, Lubbock, TX 79409, USA.
FAU - Wang, Hui
AU  - Wang H
AD  - Department of Industrial & Systems Engineering, Texas A&M University, College 
      Station, TX 77843, USA.
FAU - Ye, Gaihua
AU  - Ye G
AD  - Department of Electrical & Computer Engineering, Texas Tech University, Lubbock, 
      TX 79409, USA.
FAU - He, Rui
AU  - He R
AD  - Department of Electrical & Computer Engineering, Texas Tech University, Lubbock, 
      TX 79409, USA.
FAU - Cong, Weilong
AU  - Cong W
AD  - Department of Industrial, Manufacturing, and Systems Engineering, Texas Tech 
      University, Lubbock, TX 79409, USA. Electronic address: weilong.cong@ttu.edu.
LA  - eng
PT  - Journal Article
DEP - 20220912
PL  - Netherlands
TA  - Ultrason Sonochem
JT  - Ultrasonics sonochemistry
JID - 9433356
RN  - Z4152N8IUI (Silicon)
SB  - IM
MH  - Ceramics
MH  - Industry/methods
MH  - Mechanical Phenomena
MH  - *Silicon
MH  - *Ultrasonics
PMC - PMC9482144
OTO - NOTNLM
OT  - Brittle material
OT  - Cutting force
OT  - Cutting surface quality
OT  - Residual stress
OT  - Rotary ultrasonic surface micro-machining
COIS- Declaration of Competing Interest The authors declare that they have no known 
      competing financial interests or personal relationships that could have appeared 
      to influence the work reported in this paper.
EDAT- 2022/09/17 06:00
MHDA- 2022/09/28 06:00
PMCR- 2022/09/12
CRDT- 2022/09/16 18:15
PHST- 2022/06/30 00:00 [received]
PHST- 2022/08/22 00:00 [revised]
PHST- 2022/09/08 00:00 [accepted]
PHST- 2022/09/17 06:00 [pubmed]
PHST- 2022/09/28 06:00 [medline]
PHST- 2022/09/16 18:15 [entrez]
PHST- 2022/09/12 00:00 [pmc-release]
AID - S1350-4177(22)00258-9 [pii]
AID - 106162 [pii]
AID - 10.1016/j.ultsonch.2022.106162 [doi]
PST - ppublish
SO  - Ultrason Sonochem. 2022 Sep;89:106162. doi: 10.1016/j.ultsonch.2022.106162. Epub 
      2022 Sep 12.