PMID- 36144021
OWN - NLM
STAT- PubMed-not-MEDLINE
LR  - 20230308
IS  - 2072-666X (Print)
IS  - 2072-666X (Electronic)
IS  - 2072-666X (Linking)
VI  - 13
IP  - 9
DP  - 2022 Aug 26
TI  - Prediction Model for Liquid-Assisted Femtosecond Laser Micro Milling of Quartz 
      without Taper.
LID - 10.3390/mi13091398 [doi]
LID - 1398
AB  - The strong nonlinear absorption effect and "cold" processing characteristics of 
      femtosecond lasers make them uniquely advantageous and promising for the micro- 
      and nanoprocessing of hard and brittle materials, such as quartz. Traditional 
      methods for studying the effects of femtosecond laser parameters on the quality 
      of the processed structure mainly use univariate analysis methods, which require 
      large mounts of experiments to predict and achieve the desired experimental 
      results. The method of design of experiments (DOE) provides a way to predict 
      desirable experimental results through smaller experimental scales, shorter 
      experimental periods and lower experimental costs. In this study, a DOE program 
      was designed to investigate the effects of a serious of parameters (laser 
      repetition frequency, pulse energy, scan speed, scan distance, scan mode, scan 
      times and laser focus position) on the depth and roughness (Ra) of the fabricated 
      structure through the liquid-assisted femtosecond laser processing of quartz. A 
      prediction model between the response variables and the main parameters was 
      defined and validated. Finally, several blind holes with a size of 50 x 50 mum2 
      and a depth of 200 mum were fabricated by the prediction model, which demonstrated 
      the good consistency of the prediction model.
FAU - Yuan, Hongbing
AU  - Yuan H
AD  - Faculty of Mechanical Engineering & Mechanics, Ningbo University, Ningbo 315211, 
      China.
AD  - Ningbo Institute of Materials Technology & Engineering, Chinese Academy of 
      Sciences, Ningbo 315201, China.
FAU - Chen, Zhihao
AU  - Chen Z
AD  - Faculty of Mechanical Engineering & Mechanics, Ningbo University, Ningbo 315211, 
      China.
AD  - Ningbo Institute of Materials Technology & Engineering, Chinese Academy of 
      Sciences, Ningbo 315201, China.
FAU - Wu, Peichao
AU  - Wu P
AD  - Ningbo Institute of Materials Technology & Engineering, Chinese Academy of 
      Sciences, Ningbo 315201, China.
AD  - University of Chinese Academy of Sciences, Beijing 100049, China.
FAU - Deng, Yimin
AU  - Deng Y
AD  - Faculty of Mechanical Engineering & Mechanics, Ningbo University, Ningbo 315211, 
      China.
FAU - Cao, Xiaowen
AU  - Cao X
AD  - Ningbo Institute of Materials Technology & Engineering, Chinese Academy of 
      Sciences, Ningbo 315201, China.
FAU - Zhang, Wenwu
AU  - Zhang W
AD  - Ningbo Institute of Materials Technology & Engineering, Chinese Academy of 
      Sciences, Ningbo 315201, China.
LA  - eng
PT  - Journal Article
DEP - 20220826
PL  - Switzerland
TA  - Micromachines (Basel)
JT  - Micromachines
JID - 101640903
PMC - PMC9503145
OTO - NOTNLM
OT  - design of experiment (DOE)
OT  - femtosecond laser
OT  - liquid assisted
OT  - prediction model
COIS- The authors declare no conflict of interest.
EDAT- 2022/09/24 06:00
MHDA- 2022/09/24 06:01
PMCR- 2022/08/26
CRDT- 2022/09/23 01:33
PHST- 2022/07/20 00:00 [received]
PHST- 2022/08/20 00:00 [revised]
PHST- 2022/08/22 00:00 [accepted]
PHST- 2022/09/23 01:33 [entrez]
PHST- 2022/09/24 06:00 [pubmed]
PHST- 2022/09/24 06:01 [medline]
PHST- 2022/08/26 00:00 [pmc-release]
AID - mi13091398 [pii]
AID - micromachines-13-01398 [pii]
AID - 10.3390/mi13091398 [doi]
PST - epublish
SO  - Micromachines (Basel). 2022 Aug 26;13(9):1398. doi: 10.3390/mi13091398.