PMID- 36221464 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20221012 IS - 1094-4087 (Electronic) IS - 1094-4087 (Linking) VI - 30 IP - 10 DP - 2022 May 9 TI - Electrically controlled terahertz modulator with deep modulation and slow wave effect via a HEMT integrated metasurface. PG - 16134-16144 LID - 10.1364/OE.451677 [doi] AB - Slow wave and localized field are conducive to terahertz (THz) modulators with deep and fast modulation. Here we propose an electrically controlled THz modulator with slow wave effect and localized field composed of a high electron mobility transistor (HEMT) integrated metasurface. Unlike previously proposed schemes to realize slow wave effect electrically, this proposal controls the resonant modes directly through HEMT switches instead of the surrounding materials, leading to a modulation depth of 96% and a group delay of 10.4ps. The confined electric field where HEMT is embedded, and the slow wave effect, work together to pave a new mechanism for THz modulators with high performance. FAU - Ran, Jia AU - Ran J FAU - Chen, Tao AU - Chen T FAU - Hao, Honggang AU - Hao H FAU - Wen, Dandan AU - Wen D FAU - Zhang, Xiaolei AU - Zhang X FAU - Ren, Yi AU - Ren Y LA - eng PT - Journal Article PL - United States TA - Opt Express JT - Optics express JID - 101137103 SB - IM EDAT- 2022/10/13 06:00 MHDA- 2022/10/13 06:01 CRDT- 2022/10/12 01:53 PHST- 2022/10/12 01:53 [entrez] PHST- 2022/10/13 06:00 [pubmed] PHST- 2022/10/13 06:01 [medline] AID - 472310 [pii] AID - 10.1364/OE.451677 [doi] PST - ppublish SO - Opt Express. 2022 May 9;30(10):16134-16144. doi: 10.1364/OE.451677.