PMID- 36607015 OWN - NLM STAT- PubMed-not-MEDLINE DCOM- 20230109 LR - 20230111 IS - 1539-4522 (Electronic) IS - 1559-128X (Linking) VI - 61 IP - 30 DP - 2022 Oct 20 TI - Optimization of the annealed proton exchange method with controlled annealing for multifunctional integrated optical chip production. PG - 8898-8903 LID - 10.1364/AO.469479 [doi] AB - The main objective of our study is to develop a new approach to the annealed proton exchange (APE) method for the fabrication of the multifunctional integrated optical chip (MIOC) used in fiber-optic gyro systems and to eliminate the loss of time and material, especially in mass production applications. In this work, self-polarized waveguides, which are the basic components of a MIOC device, were produced by the APE method and studied. With the developed method, controlled annealing trials have been carried out from a certain region on the LiNbO(3) substrate used in waveguide production, and the annealing time specific to the annealing process was determined. By utilizing a special setup for the hot acid process, the proton exchange process was accomplished without a sudden temperature change of the substrate. Using prism coupling measurements of the fabricated waveguides, annealing times were determined to obtain index change values suitable for 45%-50% optical throughput. Mode profiles of devices with high optical throughput that were produced by the proposed method were measured, and it was seen that devices from different proton exchange runs had similar profiles. As a result, many undamaged substrates were fabricated, and their optical quality was found to be within the expected values. FAU - Yasemin Asik, Fatma AU - Yasemin Asik F FAU - Gokkavas, Mutlu AU - Gokkavas M FAU - Oztekin, Evren AU - Oztekin E FAU - Karagoz, Ercan AU - Karagoz E FAU - Ceylan, Abdullah AU - Ceylan A FAU - Ozbay, Ekmel AU - Ozbay E LA - eng PT - Journal Article PL - United States TA - Appl Opt JT - Applied optics JID - 0247660 SB - IM EDAT- 2023/01/07 06:00 MHDA- 2023/01/07 06:01 CRDT- 2023/01/06 09:05 PHST- 2023/01/06 09:05 [entrez] PHST- 2023/01/07 06:00 [pubmed] PHST- 2023/01/07 06:01 [medline] AID - 509782 [pii] AID - 10.1364/AO.469479 [doi] PST - ppublish SO - Appl Opt. 2022 Oct 20;61(30):8898-8903. doi: 10.1364/AO.469479.