PMID- 36837114 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20230227 IS - 1996-1944 (Print) IS - 1996-1944 (Electronic) IS - 1996-1944 (Linking) VI - 16 IP - 4 DP - 2023 Feb 10 TI - Effect of Electro-Thermo-Mechanical Coupling Stress on Top-Cooled E-Mode AlGaN/GaN HEMT. LID - 10.3390/ma16041484 [doi] LID - 1484 AB - This work investigated the effects of single stress and electro-thermo-mechanical coupling stress on the electrical properties of top-cooled enhancement mode (E-mode) Aluminium Gallium Nitride/Gallium Nitride (AlGaN/GaN) high electron mobility transistor (HEMT) (GS66508T). Planar pressure, linear deformation, punctate deformation, environmental temperature, electro-thermal coupling, thermo-mechanical coupling, and electro-thermo-mechanical coupling stresses were applied to the device. It was found that different kinds of stress had different influence mechanisms on the device. Namely, excessive mechanical pressure/deformation stress caused serious, irrecoverable degradation of the device's leakage current, with the gate leakage current (I(g)) increasing by ~10(7) times and the drain-to-source leakage current (I(dss)) increasing by ~10(6) times after mechanical punctate deformation of 0.5 mm. The device characteristics were not restored after the mechanical stress was removed. Compared with three mechanical stresses, environmental thermal stress had a greater influence on the device's transfer characteristic and on-resistance (R(on)) but far less influence on I(g) and I(dss). As was expected, multiple stress coupled to the device promoted invalidation of the device. For more in-depth investigation, finite element simulation carried out with COMSOL was used to analyze the effect of electro-thermo-mechanical coupling stress on top-cooled E-mode AlGaN/GaN HEMT. The results of the experiments and simulation demonstrated that single and coupled stresses, especially mechanical stress coupled with other stresses, degraded the electrical properties or even caused irreversible damage to top-cooled E-mode AlGaN/GaN HEMT. Mechanical stress should be reduced as much as possible in the packaging design, transportation, storage, and application of top-cooled E-mode AlGaN/GaN HEMT. FAU - Jiang, Jie AU - Jiang J AUID- ORCID: 0000-0003-1256-4658 AD - School of Microelectronics and Communication Engineering, Chongqing University, Chongqing 400044, China. AD - The Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, China Electronic Product Reliability and Environmental Testing Research Institute, Guangzhou 510610, China. FAU - Chen, Qiuqi AU - Chen Q AD - The Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, China Electronic Product Reliability and Environmental Testing Research Institute, Guangzhou 510610, China. FAU - Hu, Shengdong AU - Hu S AD - School of Microelectronics and Communication Engineering, Chongqing University, Chongqing 400044, China. FAU - Shi, Yijun AU - Shi Y AUID- ORCID: 0000-0001-8485-1109 AD - The Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, China Electronic Product Reliability and Environmental Testing Research Institute, Guangzhou 510610, China. FAU - He, Zhiyuan AU - He Z AD - The Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, China Electronic Product Reliability and Environmental Testing Research Institute, Guangzhou 510610, China. FAU - Huang, Yun AU - Huang Y AD - The Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, China Electronic Product Reliability and Environmental Testing Research Institute, Guangzhou 510610, China. FAU - Hui, Caixin AU - Hui C AD - The Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, China Electronic Product Reliability and Environmental Testing Research Institute, Guangzhou 510610, China. FAU - Chen, Yiqiang AU - Chen Y AUID- ORCID: 0000-0001-6901-3000 AD - The Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, China Electronic Product Reliability and Environmental Testing Research Institute, Guangzhou 510610, China. FAU - Wu, Hao AU - Wu H AD - Science and Technology on Analog Integrated Circuit Laboratory, Chongqing 401332, China. FAU - Lu, Guoguang AU - Lu G AD - The Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, China Electronic Product Reliability and Environmental Testing Research Institute, Guangzhou 510610, China. LA - eng GR - 62004046/National Natural Science Foundation of China/ GR - 2020B010173001/Key-Area Research and Development Program of Guangdong Province/ GR - 2022A1515012127/Natural Science Foundation of Guangdong Province/ GR - 2021-JCJQ-LB-049-7/the open Funds of the National Laboratory of Science and Technology on Analog Integrated Circuit/ PT - Journal Article DEP - 20230210 PL - Switzerland TA - Materials (Basel) JT - Materials (Basel, Switzerland) JID - 101555929 PMC - PMC9959725 OTO - NOTNLM OT - AlGaN/GaN OT - COMSOL OT - HEMT OT - electro-thermo-mechanical coupling COIS- The authors declare no conflict of interest. EDAT- 2023/02/26 06:00 MHDA- 2023/02/26 06:01 PMCR- 2023/02/10 CRDT- 2023/02/25 03:25 PHST- 2022/11/07 00:00 [received] PHST- 2023/01/14 00:00 [revised] PHST- 2023/01/25 00:00 [accepted] PHST- 2023/02/25 03:25 [entrez] PHST- 2023/02/26 06:00 [pubmed] PHST- 2023/02/26 06:01 [medline] PHST- 2023/02/10 00:00 [pmc-release] AID - ma16041484 [pii] AID - materials-16-01484 [pii] AID - 10.3390/ma16041484 [doi] PST - epublish SO - Materials (Basel). 2023 Feb 10;16(4):1484. doi: 10.3390/ma16041484.