PMID- 37420559
OWN - NLM
STAT- PubMed-not-MEDLINE
DCOM- 20230710
LR  - 20230718
IS  - 1424-8220 (Electronic)
IS  - 1424-8220 (Linking)
VI  - 23
IP  - 12
DP  - 2023 Jun 7
TI  - Multiple-Degree-of-Freedom Modeling and Simulation for Seismic-Grade Sigma-Delta 
      MEMS Capacitive Accelerometers.
LID - 10.3390/s23125394 [doi]
LID - 5394
AB  - The high-order mechanical resonances of the sensing element in a high-vacuum 
      environment can significantly degrade the noise and distortion performance of 
      seismic-grade sigma-delta MEMS capacitive accelerometers. However, the current 
      modeling approach is unable to evaluate the effects of high-order mechanical 
      resonances. This study proposes a novel multiple-degree-of-freedom (MDOF) model 
      to evaluate the noise and distortion induced by high-order mechanical resonances. 
      Firstly, the MDOF dynamic equations of the sensing element are derived using the 
      principle of modal superposition and Lagrange's equations. Secondly, a 
      fifth-order electromechanical sigma-delta system of the MEMS accelerometer is 
      established in Simulink based on the dynamic equations of the sensing element. 
      Then, the mechanism through which the high-order mechanical resonances degrade 
      the noise and distortion performances is discovered by analyzing the simulated 
      result. Finally, a noise and distortion suppression method is proposed based on 
      the appropriate improvement in high-order natural frequency. The results show 
      that the low-frequency noise drastically decreases from about -120.5 dB to -175.3 
      dB after the high-order natural frequency increases from about 130 kHz to 455 
      kHz. The harmonic distortion also reduces significantly.
FAU - Wang, Xuefeng
AU  - Wang X
AD  - State Key Laboratory of ASIC and System, School of Microelectronics, Fudan 
      University, Shanghai 200433, China.
FAU - Zhang, Penghao
AU  - Zhang P
AD  - State Key Laboratory of ASIC and System, School of Microelectronics, Fudan 
      University, Shanghai 200433, China.
FAU - Ding, Shijin
AU  - Ding S
AD  - State Key Laboratory of ASIC and System, School of Microelectronics, Fudan 
      University, Shanghai 200433, China.
LA  - eng
PT  - Journal Article
DEP - 20230607
PL  - Switzerland
TA  - Sensors (Basel)
JT  - Sensors (Basel, Switzerland)
JID - 101204366
SB  - IM
MH  - *Micro-Electrical-Mechanical Systems
MH  - Computer Simulation
MH  - Records
MH  - Vacuum
MH  - Accelerometry
PMC - PMC10305370
OTO - NOTNLM
OT  - MEMS accelerometers
OT  - electromechanical modeling
OT  - multiple-degree-of-freedom
OT  - noise
OT  - sigma-delta
COIS- The authors declare no conflict of interest.
EDAT- 2023/07/08 10:42
MHDA- 2023/07/10 06:42
PMCR- 2023/06/07
CRDT- 2023/07/08 01:10
PHST- 2023/05/06 00:00 [received]
PHST- 2023/06/03 00:00 [revised]
PHST- 2023/06/05 00:00 [accepted]
PHST- 2023/07/10 06:42 [medline]
PHST- 2023/07/08 10:42 [pubmed]
PHST- 2023/07/08 01:10 [entrez]
PHST- 2023/06/07 00:00 [pmc-release]
AID - s23125394 [pii]
AID - sensors-23-05394 [pii]
AID - 10.3390/s23125394 [doi]
PST - epublish
SO  - Sensors (Basel). 2023 Jun 7;23(12):5394. doi: 10.3390/s23125394.