PMID- 38067929
OWN - NLM
STAT- PubMed-not-MEDLINE
LR  - 20231209
IS  - 1424-8220 (Electronic)
IS  - 1424-8220 (Linking)
VI  - 23
IP  - 23
DP  - 2023 Dec 1
TI  - The Fabrication and Evaluation of a Capacitive Pressure Sensor Using Ru-Based 
      Thin Film Metallic Glass with Structural Relaxation by Heat Treatment.
LID - 10.3390/s23239557 [doi]
LID - 9557
AB  - Microelectromechanical systems (MEMS)-based capacitive pressure sensors are 
      conventionally fabricated from diaphragms made of Si, which has a high elastic 
      modulus that limits the control of internal stress and constrains size reduction 
      and low-pressure measurements. Ru-based thin-film metallic glass (TFMG) exhibits 
      a low elastic modulus, and the internal stress can be controlled by heat 
      treatment, so it may be a suitable diaphragm material for facilitating size 
      reduction of the sensor without performance degradation. In this study, a 
      Ru-based TFMG was used to realize a flattened diaphragm, and structural 
      relaxation was achieved through annealing at 310  degrees C for 1 h in a vacuum. The 
      diaphragm easily deformed, even under low differential pressure, when reduced in 
      size. A diaphragm with a diameter of 1.7 mm was then applied to successfully 
      fabricate a capacitive pressure sensor with a sensor size of 2.4 mm(2). The 
      sensor exhibited a linearity of +/-3.70% full scale and a sensitivity of 0.09 fF/Pa 
      in the differential pressure range of 0-500 Pa.
FAU - Otsuka, Hodaka
AU  - Otsuka H
AD  - Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan.
FAU - Ninoseki, Takafumi
AU  - Ninoseki T
AD  - Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan.
FAU - Oka, Chiemi
AU  - Oka C
AD  - Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan.
FAU - Hata, Seiichi
AU  - Hata S
AD  - Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan.
FAU - Sakurai, Junpei
AU  - Sakurai J
AUID- ORCID: 0000-0001-7713-5761
AD  - Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan.
LA  - eng
PT  - Journal Article
DEP - 20231201
PL  - Switzerland
TA  - Sensors (Basel)
JT  - Sensors (Basel, Switzerland)
JID - 101204366
SB  - IM
PMC - PMC10708769
OTO - NOTNLM
OT  - MEMS
OT  - capacitive pressure sensor
OT  - thin film metallic glass
COIS- The authors declare no conflict of interest.
EDAT- 2023/12/09 10:46
MHDA- 2023/12/09 10:47
PMCR- 2023/12/01
CRDT- 2023/12/09 01:07
PHST- 2023/10/31 00:00 [received]
PHST- 2023/11/23 00:00 [revised]
PHST- 2023/11/30 00:00 [accepted]
PHST- 2023/12/09 10:47 [medline]
PHST- 2023/12/09 10:46 [pubmed]
PHST- 2023/12/09 01:07 [entrez]
PHST- 2023/12/01 00:00 [pmc-release]
AID - s23239557 [pii]
AID - sensors-23-09557 [pii]
AID - 10.3390/s23239557 [doi]
PST - epublish
SO  - Sensors (Basel). 2023 Dec 1;23(23):9557. doi: 10.3390/s23239557.