PMID- 38258177 OWN - NLM STAT- PubMed-not-MEDLINE LR - 20240129 IS - 2072-666X (Print) IS - 2072-666X (Electronic) IS - 2072-666X (Linking) VI - 15 IP - 1 DP - 2023 Dec 27 TI - Optimization of Gate-Head-Top/Bottom Lengths of AlGaN/GaN High-Electron-Mobility Transistors with a Gate-Recessed Structure for High-Power Operations: A Simulation Study. LID - 10.3390/mi15010057 [doi] LID - 57 AB - In this study, we propose an optimized AlGaN/GaN high-electron-mobility transistor (HEMT) with a considerably improved breakdown voltage. First, we matched the simulated data obtained from a basic T-gate HEMT with the measured data obtained from the fabricated device to ensure the reliability of the simulation. Thereafter, to improve the breakdown voltage, we suggested applying a gate-head extended structure. The gate-head-top and gate-head-bottom lengths of the basic T-gate HEMT were symmetrically extended by 0.2 mum steps up to 1.0 mum. The breakdown voltage of the 1.0 mum extended structure was 52% higher than that of the basic T-gate HEMT. However, the cutoff frequency (fT) and maximum frequency (fmax) degraded. To minimize the degradation of fT and fmax, we additionally introduced a gate-recessed structure to the 1.0 mum gate-head extended HEMT. The thickness of the 25 nm AlGaN barrier layer was thinned down to 13 nm in 3 nm steps, and the highest fT and fmax were obtained at a 6 nm recessed structure. The fT and fmax of the gate-recessed structure improved by 9% and 28%, respectively, with respect to those of the non-gate-recessed structure, and further improvement of the breakdown voltage by 35% was observed. Consequently, considering the trade-off relationship between the DC and RF characteristics, the 1.0 mum gate-head extended HEMT with the 6 nm gate-recessed structure was found to be the optimized AlGaN/GaN HEMT for high-power operations. FAU - Kang, Woo-Seok AU - Kang WS AD - Division of Electronics and Electrical Engineering, Dongguk University-Seoul, Seoul 04620, Republic of Korea. FAU - Choi, Jun-Hyeok AU - Choi JH AD - Division of Electronics and Electrical Engineering, Dongguk University-Seoul, Seoul 04620, Republic of Korea. FAU - Kim, Dohyung AU - Kim D AD - Division of Electronics and Electrical Engineering, Dongguk University-Seoul, Seoul 04620, Republic of Korea. FAU - Kim, Ji-Hun AU - Kim JH AD - Division of Electronics and Electrical Engineering, Dongguk University-Seoul, Seoul 04620, Republic of Korea. FAU - Lee, Jun-Ho AU - Lee JH AD - Division of Electronics and Electrical Engineering, Dongguk University-Seoul, Seoul 04620, Republic of Korea. FAU - Min, Byoung-Gue AU - Min BG AD - Electronics and Telecommunications Research Institute, Daejeon 34129, Republic of Korea. FAU - Kang, Dong Min AU - Kang DM AD - Electronics and Telecommunications Research Institute, Daejeon 34129, Republic of Korea. FAU - Choi, Jung Han AU - Choi JH AD - Photonic Components Department, Fraunhofer Heinrich-Hertz Institute, Einsteinufer 37, 10587 Berlin, Germany. FAU - Kim, Hyun-Seok AU - Kim HS AUID- ORCID: 0000-0003-1127-5766 AD - Division of Electronics and Electrical Engineering, Dongguk University-Seoul, Seoul 04620, Republic of Korea. LA - eng GR - 2021-0-00760/Institute of Information and Communications Technology Planning and Evaluation/ GR - P0017307/Korea Institute for Advancement of Technology/ PT - Journal Article DEP - 20231227 PL - Switzerland TA - Micromachines (Basel) JT - Micromachines JID - 101640903 PMC - PMC10821524 OTO - NOTNLM OT - breakdown voltage OT - gallium nitride OT - gate-head OT - gate-recessed OT - high-electron-mobility transistor COIS- The authors declare no conflicts of interest. EDAT- 2024/01/23 06:43 MHDA- 2024/01/23 06:44 PMCR- 2023/12/27 CRDT- 2024/01/23 01:25 PHST- 2023/12/02 00:00 [received] PHST- 2023/12/22 00:00 [revised] PHST- 2023/12/26 00:00 [accepted] PHST- 2024/01/23 06:44 [medline] PHST- 2024/01/23 06:43 [pubmed] PHST- 2024/01/23 01:25 [entrez] PHST- 2023/12/27 00:00 [pmc-release] AID - mi15010057 [pii] AID - micromachines-15-00057 [pii] AID - 10.3390/mi15010057 [doi] PST - epublish SO - Micromachines (Basel). 2023 Dec 27;15(1):57. doi: 10.3390/mi15010057.